Use a drill to remove approximately 500 square feet of tiles and thin layers. The drill showed no signs of wear after the work was completed. Used with Chicago Electric 1-1/8" 10Amp Heavy Duty SDS Variable Speed Hammer Drill. Highly recommended. I made a "dust cap" out of an old plastic container by punching a hole twice the width of the tile and a hole cut for a shop vacuum. This setup contained flying pieces of tile and minimized the amount of fine dust. The trick is to find the right angle. Too shallow and you'll chip the tile, too steep and you'll poke holes in the concrete. Use no max settings on the punch, just flip it over until you get a good tile/thin layer removal, running at 100% just beats you.